Utilizing Secondary Ion Mass Spectrometry (SIMS) for in-line metrology is a newly emerging method of process control that requires contamination-free measurements, enabling SIMS on product wafers.
Electron affinity, defined as the energy released when an electron attaches to a neutral atom, is a fundamental parameter in understanding atomic reactivity and material properties. Negative ion ...
Mitsubishi Electric Corporation (TOKYO: 6503) announced today that in collaboration with Professor Toshiaki Kamachi and colleagues from the School of Life Science and Technology at Institute of ...